![]() ![]() ![]() Piezoelectric materials, such as lead zirconate titanate Pb(Zr,Ti)O 3 (PZT) for example, provide the means to convert between mechanical and electrical energies that arise from direct and converse piezoelectric effects. The comparative discussion in this study provides valuable insights of crystallographic contributions and opens the way to improve the piezoelectricity in thin-film based piezoelectric devices. The results also revealed large and nonlinear piezoelectric properties for the polycrystalline PZT thin film. The electric field dependences of the piezoelectric coefficients obtained from both characterization were in good agreement with each other. The effective piezoelectric coefficients were estimated from the relationship between electric field and field-induced strain, and compared with those characterized by the macroscopic cantilever method. We observed the reversible elongation and contraction of lattice parameter under an applied electric field using synchrotron X-ray diffraction. We report on the correlated investigation between macroscopic piezoelectric properties and the microscopic deformation of crystal structures of both epitaxial and polycrystalline Pb(Zr,Ti)O 3 (PZT) thin films grown on MgO and Si substrates, respectively.
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